Invention Grant
- Patent Title: Contact pads of three-dimensional memory device and fabrication method thereof
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Application No.: US17249222Application Date: 2021-02-24
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Publication No.: US12033966B2Publication Date: 2024-07-09
- Inventor: He Chen , Liang Xiao , Yongqing Wang , Shu Wu
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Wuhan
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Wuhan
- Agency: Anova Law Group, PLLC
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/00 ; H01L25/065 ; H10B41/27 ; H10B43/27

Abstract:
Three-dimensional (3D) NAND memory devices and methods are provided. In one aspect, a fabrication method includes preparing a stacked device having a first array device and a second array device, forming an opening on a back side of the second array device, and forming one or more contact pads in the opening. The first array device includes first front pads on a face side of the first array device and first back pads on a back side of the first array device. The second array device includes second front pads on a face side of the second array device and bonded with the first back pads. The one or more contact pads are disposed at a level proximate to the second front pads with respect to the first array device.
Public/Granted literature
- US20220208705A1 CONTACT PADS OF THREE-DIMENSIONAL MEMORY DEVICE AND FABRICATION METHOD THEREOF Public/Granted day:2022-06-30
Information query
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