Invention Grant
- Patent Title: Semiconductor device segmented interconnect
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Application No.: US17463022Application Date: 2021-08-31
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Publication No.: US12034009B2Publication Date: 2024-07-09
- Inventor: Chih-Yu Lai , Chih-Liang Chen , Ching-Wei Tsai , Shang-Wen Chang , Li-Chun Tien
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/768 ; H01L21/822 ; H01L21/8234 ; H01L23/48 ; H01L23/528 ; H01L23/535 ; H01L27/06 ; H01L27/088 ; H01L29/423 ; H01L29/786

Abstract:
A semiconductor device includes a base isolation layer, a first transistor with a first source electrode at a first side of the base isolation layer. A bridge pillar extends through the base isolation layer, and a metal electrode electrically connects the bridge pillar to the first source electrode. The metal electrode and the first source electrode are at the same side of the base isolation layer. A second metal electrode at an opposite side of the base isolation layer electrically connects to the bridge pillar and to a conductive line at the second side of the base isolation layer.
Public/Granted literature
- US20230067952A1 SEMICONDUCTOR DEVICE SEGMENTED INTERCONNECT Public/Granted day:2023-03-02
Information query
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