Invention Grant
- Patent Title: Acoustic wave device
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Application No.: US17471221Application Date: 2021-09-10
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Publication No.: US12034427B2Publication Date: 2024-07-09
- Inventor: Shou Nagatomo , Hideki Iwamoto , Takeshi Nakao
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP 20045395 2020.03.16
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/13

Abstract:
An acoustic wave device includes a support substrate, a piezoelectric film, a functional electrode, and a support. The support substrate includes a cavity. The piezoelectric film is provided on the support substrate to cover the cavity. The functional electrode is provided on the piezoelectric film to overlap the cavity when viewed in a plan view. The support is in the cavity of the support substrate to support the piezoelectric film. The functional electrode includes electrodes arranged in a direction crossing the thickness direction of the piezoelectric film. The electrodes include a first electrode and a second electrode. The first electrode and the second electrode oppose each other in a direction crossing the thickness direction of the piezoelectric film and are connected to different potentials. Adjacent ones of the electrodes overlap each other in a direction orthogonal to a longitudinal direction of the first electrode.
Public/Granted literature
- US20210408994A1 ACOUSTIC WAVE DEVICE Public/Granted day:2021-12-30
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