Invention Grant
- Patent Title: Three dimensional memory device containing dummy word lines and p-n junction at joint region and method of making the same
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Application No.: US17485949Application Date: 2021-09-27
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Publication No.: US12035520B2Publication Date: 2024-07-09
- Inventor: Yanli Zhang , Peng Zhang
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: THE MARBURY LAW GROUP PLLC
- Main IPC: H10B41/20
- IPC: H10B41/20 ; H10B41/10 ; H10B41/41 ; H10B43/10 ; H10B43/20 ; H10B43/40

Abstract:
A three-dimensional memory device includes a first alternating stack of first insulating layers and first electrically conductive layers located over a semiconductor material layer, an inter-tier dielectric layer, and a second alternating stack of second insulating layers and second electrically conductive layers located over the inter-tier dielectric layer. A memory opening vertically extends through the second alternating stack, the inter-tier dielectric layer, and the first alternating stack. A memory opening fill structure is located in the memory opening, and includes a first vertical semiconductor channel, a second vertical semiconductor channel, and an inter-tier doped region located between the first and the second semiconductor channel, and providing a first p-n junction with the first vertical semiconductor channel and providing a second p-n junction with the second vertical semiconductor channel.
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