Invention Grant
- Patent Title: Semiconductor device with CMOS process based hall sensor and manufacturing method
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Application No.: US17522012Application Date: 2021-11-09
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Publication No.: US12035637B2Publication Date: 2024-07-09
- Inventor: Jungmun Jung
- Applicant: SK keyfoundry Inc.
- Applicant Address: KR Cheongju-si
- Assignee: SK keyfoundry Inc.
- Current Assignee: SK keyfoundry Inc.
- Current Assignee Address: KR Cheongju-si
- Agency: NSIP Law
- Priority: KR 20210053026 2021.04.23
- Main IPC: H10N52/00
- IPC: H10N52/00 ; G01R33/07 ; H10N52/01 ; H10N52/80

Abstract:
A semiconductor device including a CMOS process-based Hall sensor is provided. The semiconductor device which may include a N-type sensing region which is formed on a semiconductor substrate; P-type contact regions and N-type contact regions which are alternately formed in the N-type sensing region; a plurality of first trenches which are formed in contact with the P-type contact regions and have a first width; and a plurality of second trenches which separate the P-type contact regions and the N-type contact regions and have a second width less than the first width.
Public/Granted literature
- US20220344581A1 SEMICONDUCTOR DEVICE WITH CMOS PROCESS BASED HALL SENSOR AND MANUFACTURING METHOD Public/Granted day:2022-10-27
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