Liquid material discharge device for discharging a fixed amount of liquid material
Abstract:
A discharge device capable of suppressing pressure fluctuation of a compressed gas supplied to a container in which a liquid material is stored. The device includes a storage container in which a liquid material is stored; a discharge port through which the liquid material is discharged; a pressure control valve that adjusts a pressure of a compressed gas supplied from an external compressed gas source to a desired level; a discharge valve that establishes or cuts off communication between the pressure control valve and the storage container; a control device that controls operation of the discharge valve; a first flow line connecting the pressure control valve and the discharge valve; and a second flow line connecting the discharge valve and the storage container. The device further includes a third flow line branched from the first flow line, and a leak mechanism connected to the third flow line.
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