Invention Grant
- Patent Title: Organic interposer including intra-die structural reinforcement structures and methods of forming the same
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Application No.: US18121189Application Date: 2023-03-14
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Publication No.: US12040267B2Publication Date: 2024-07-16
- Inventor: Li-Ling Liao , Ming-Chih Yew , Chia-Kuei Hsu , Shu-Shen Yeh , Po-Yao Lin , Shin-Puu Jeng
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: The Marbury Law Group, PLLC
- The original application number of the division: US17085186 2020.10.30
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/498 ; H10K71/00

Abstract:
An organic interposer includes dielectric material layers embedding redistribution interconnect structures, package-side bump structures located on a first side of the dielectric material layers, and die-side bump structures located on a second side of the dielectric material layers. A gap region is present between a first area including first die-side bump structures and a second area including second die-side bump structures. Stress-relief line structures are located on, or within, the dielectric material layers within an area of the gap region in the plan view. Each stress-relief line structures may include straight line segments that laterally extend along a respective horizontal direction and is not electrically connected to the redistribution interconnect structures. The stress-relief line structures may include the same material as, or may include a different material from, a metallic material of the redistribution interconnect structures or bump structures that are located at a same level.
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