Invention Grant
- Patent Title: Method of manufacturing an integrated circuit device
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Application No.: US18212304Application Date: 2023-06-21
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Publication No.: US12040326B2Publication Date: 2024-07-16
- Inventor: Junggil Yang , Minju Kim , Donghyi Koh
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR 20200166965 2020.12.02
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/06 ; H01L29/78

Abstract:
An integrated circuit device including a substrate including first and second device regions; a first fin active region on the first device region; a second fin active region on the second device region; an isolation film covering side walls of the active regions; gate cut insulating patterns on the isolation film on the device regions; a gate line extending on the fin active regions, the gate line having a length limited by the gate cut insulating patterns; and an inter-region insulating pattern on the isolation film between the fin active regions and at least partially penetrating the gate line in a vertical direction, wherein the inter-region insulating pattern has a bottom surface proximate to the substrate, a top surface distal to the substrate, and a side wall linearly extending from the bottom to the top surface.
Public/Granted literature
- US20230335552A1 METHOD OF MANUFACTURING AN INTEGRATED CIRCUIT DEVICE Public/Granted day:2023-10-19
Information query
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