Invention Grant
- Patent Title: Capacitor, semiconductor device, and manufacturing method of semiconductor device
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Application No.: US18232413Application Date: 2023-08-10
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Publication No.: US12041765B2Publication Date: 2024-07-16
- Inventor: Yuichi Sato , Ryota Hodo , Yuta Iida , Tomoaki Moriwaka
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Applicant Address: JP Atsugi
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi
- Agency: Fish & Richardson P.C.
- Priority: JP 17013142 2017.01.27
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L21/02 ; H01L21/311 ; H01L21/321 ; H01L23/532

Abstract:
A semiconductor device that can be miniaturized or highly integrated is provided. The semiconductor device includes a transistor and a capacitor. The transistor includes a metal oxide and a first conductor that is electrically connected to the metal oxide. The capacitor includes a first insulator which is provided over the metal oxide and which the first conductor penetrates; a second insulator provided over the first insulator and including an opening reaching the first insulator and the first conductor; a second conductor in contact with an inner wall of the opening, the first insulator, and the first conductor; a third insulator provided over the second conductor; and a fourth conductor provided over the third insulator. The first insulator has higher capability of inhibiting the passage of hydrogen than the second insulator.
Public/Granted literature
- US20240090194A1 CAPACITOR, SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE Public/Granted day:2024-03-14
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