- Patent Title: Semiconductor storage device and method for manufacturing the same
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Application No.: US17458181Application Date: 2021-08-26
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Publication No.: US12041777B2Publication Date: 2024-07-16
- Inventor: Kohei Nakagami
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP 21024244 2021.02.18
- Main IPC: H10B43/35
- IPC: H10B43/35 ; G11C16/04 ; H01L29/423 ; H01L29/66 ; H01L29/792 ; H10B43/10 ; H10B43/20

Abstract:
A device includes a semiconductor substrate including a first well region and a second well region; a first transistor including a first gate insulating layer provided above the first well region, a first gate electrode having a semiconductor, and a second gate electrode having a metal; a second transistor including a second gate insulating layer provided above the second well region, a third gate electrode having a semiconductor, and a fourth gate electrode having a metal; an element isolation area disposed between the first and second well regions; and a first insulating layer formed above the element isolation area. The first insulating layer has a first portion extending over the first gate electrode and a second portion extending over the third gate electrode, a portion of the second gate electrode is formed above the first portion, and a portion of the fourth gate electrode is formed above the second portion.
Public/Granted literature
- US20220262807A1 SEMICONDUCTOR STORAGE DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2022-08-18
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