Invention Grant
- Patent Title: Semiconductor storage device and method for manufacturing semiconductor storage device
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Application No.: US17464173Application Date: 2021-09-01
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Publication No.: US12041778B2Publication Date: 2024-07-16
- Inventor: Yosuke Mitsuno , Tatsufumi Hamada , Shinichi Sotome , Tomohiro Kuki
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: KIOXIA CORPORATION
- Current Assignee: KIOXIA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP 21043362 2021.03.17
- Main IPC: H10B43/35
- IPC: H10B43/35 ; G11C16/04 ; H10B43/10 ; H10B43/20

Abstract:
A semiconductor storage device includes a first stacked body, a second stacked body, an intermediate insulating layer, and a plurality of columnar bodies. The intermediate insulating layer is located between a first stacked body and a second stacked body and has a thickness in the stacking direction larger than that of one insulating layer in the plurality of insulating layers of the first stacked body. The plurality of columnar bodies are provided over the first stacked body and the second stacked body, and each columnar body includes a semiconductor body, a charge storage film provided between at least one of the plurality of conductive layers and the semiconductor body, and a semiconductor film. Each of the plurality of columnar bodies include a first columnar portion formed in the first stacked body, a second columnar portion formed in the intermediate insulating layer, and a third columnar portion formed in the second stacked body. A width of the semiconductor film in the second columnar portion in a direction intersecting the stacking direction is the shortest at an upper end of the intermediate columnar portion and the longest at a lower end of the intermediate columnar portion.
Public/Granted literature
- US20220302138A1 SEMICONDUCTOR STORAGE DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2022-09-22
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