Invention Grant
- Patent Title: Manufacturing apparatus and manufacturing method of porous glass base material for optical fiber
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Application No.: US17872407Application Date: 2022-07-25
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Publication No.: US12043564B2Publication Date: 2024-07-23
- Inventor: Naoto Noda , Hitoshi Iinuma
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP 19109084 2019.06.11
- The original application number of the division: US16896623 2020.06.09
- Main IPC: C03B37/014
- IPC: C03B37/014 ; C03B37/016 ; C03B37/07 ; G02B1/04

Abstract:
A manufacturing method of a porous glass base material for optical fiber includes: controlling a flow rate of a raw material liquid of an organic siloxane by a liquid mass flow controller; introducing raw material liquid to a raw material liquid nozzle of a vaporizer by a raw material liquid pipe; ejecting raw material liquid into the vaporizer; mixing raw material liquid and carrier gas to vaporize raw material liquid to form mixed gas; supplying mixed gas to a burner; combusting mixed gas together with a combustible gas and a combustion supporting gas in the burner to produce SiO2 particles; depositing SiO2 particles on a starting core base material to form the porous glass base material; and closing an open/close valve on a flow path of the raw material liquid pipe to stop supply of raw material liquid, while continuing to supply carrier gas, combustible gas, and combustion supporting gas.
Public/Granted literature
- US20220363583A1 MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF POROUS GLASS BASE MATERIAL FOR OPTICAL FIBER Public/Granted day:2022-11-17
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