Invention Grant
- Patent Title: Semiconductor device
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Application No.: US17456570Application Date: 2021-11-24
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Publication No.: US12051591B2Publication Date: 2024-07-30
- Inventor: Yoshiharu Kato , Toru Ajiki , Takashi Yoshimura
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kanagawa
- Priority: JP 19227139 2019.12.17
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/265

Abstract:
Provided is a semiconductor device comprising: a semiconductor substrate; a plurality of peaks of a doping concentration provided on a back surface of the semiconductor substrate; and a flat part, with a doping concentration more than or equal to 2.5 times a substrate concentration of the semiconductor substrate, provided between the plurality of peaks in a depth direction of the semiconductor substrate, wherein at least one of the plurality of peaks is a first peak provided on a front surface side relative to the flat part, wherein a doping concentration of the first peak is less than or equal to twice the doping concentration of the flat part.
Public/Granted literature
- US20220084826A1 SEMICONDUCTOR DEVICE Public/Granted day:2022-03-17
Information query
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