Invention Grant
- Patent Title: Methods for forming semiconductor structures and semiconductor structures
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Application No.: US17430279Application Date: 2021-02-08
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Publication No.: US12051618B2Publication Date: 2024-07-30
- Inventor: Nianwang Yang , Yuchen Wang
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: CN 2010123734.4 2020.02.27
- International Application: PCT/CN2021/075941 2021.02.08
- International Announcement: WO2021/169786A 2021.09.02
- Date entered country: 2021-08-11
- Main IPC: H01L21/4763
- IPC: H01L21/4763 ; H01L21/768

Abstract:
The present invention relates to the technical field of semiconductor manufacturing, and in particular, to a method for forming a semiconductor structure and a semiconductor structure. The method for forming a semiconductor structure comprises: forming an interconnect layer and a conductive layer covered on a surface of the interconnect layer; forming a protective layer covering a surface of the conductive layer away from the interconnect layer; forming a trench penetrating the protective layer and the conductive layer; and filling a dielectric layer in the trench, and forming an air gap in the dielectric layer, the air gap extending from the trench in the conductive layer into the trench in the protective layer.
Public/Granted literature
- US20230116971A1 METHODS FOR FORMING SEMICONDUCTOR STRUCTURES AND SEMICONDUCTOR STRUCTURES Public/Granted day:2023-04-20
Information query
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