- Patent Title: Germanium-containing photodetector and methods of forming the same
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Application No.: US18358257Application Date: 2023-07-25
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Publication No.: US12051763B2Publication Date: 2024-07-30
- Inventor: Jyh-Ming Hung , Tzu-Jui Wang , Kuan-Chieh Huang , Jhy-Jyi Sze
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: The Marbury Law Group, PLLC
- The original application number of the division: US17227432 2021.04.12
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L23/00 ; H01L27/146 ; H01L31/103 ; H01L31/105

Abstract:
A photovoltaic cell includes a germanium-containing well embedded in a single crystalline silicon substrate and extending to a proximal horizontal surface of the single crystalline silicon substrate, wherein germanium-containing well includes germanium at an atomic percentage greater than 50%. A silicon-containing capping structure is located on a top surface of the germanium-containing well and includes silicon at an atomic percentage greater than 42%. The silicon-containing capping structure prevents oxidation of the germanium-containing well. A photovoltaic junction may be formed within, or across, the trench by implanting dopants of a first conductivity type and dopants of a second conductivity type.
Public/Granted literature
- US20230369360A1 GERMANIUM-CONTAINING PHOTODETECTOR AND METHODS OF FORMING THE SAME Public/Granted day:2023-11-16
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