Invention Grant
- Patent Title: Vertical contacts for semiconductor devices
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Application No.: US18131097Application Date: 2023-04-05
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Publication No.: US12052858B2Publication Date: 2024-07-30
- Inventor: Byung Yoon Kim , Sangmin Hwang , Kyuseok Lee
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Brooks, Cameron & Huebsch, PLLC
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L21/02 ; H01L29/06 ; H01L29/423 ; H01L29/66 ; H01L29/786

Abstract:
Embodiments herein relate to vertical contacts for semiconductor devices. For instance, a memory device having vertical contacts can comprise a substrate including circuitry components, a vertical stack of layers formed from repeating iterations of a group of layers disposed on the substrate, the group of layers comprising a first dielectric material layer, a semiconductor material layer, and a second dielectric material layer including horizontal conductive lines formed along a horizontal plane in the second dielectric material layer, and vertical contacts coupled to the horizontal conductive lines, the vertical contacts extending along a vertical plane within the vertical stack of layers to directly electrically couple the horizontal conductive lines to the circuitry components.
Public/Granted literature
- US20230240067A1 VERTICAL CONTACTS FOR SEMICONDUCTOR DEVICES Public/Granted day:2023-07-27
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