Invention Grant
- Patent Title: MEMS comprising a movable structural element, and MEMS array
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Application No.: US16950782Application Date: 2020-11-17
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Publication No.: US12054384B2Publication Date: 2024-08-06
- Inventor: Peter Duerr , Andreas Neudert
- Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e. V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e. V.
- Current Assignee Address: DE Munich
- Agency: Perkins Coie LLP
- Agent Michael A. Glenn
- Priority: DE 2018207783.5 2018.05.17
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00 ; H02N1/00

Abstract:
A MEMS includes a substrate with a substrate extension that rises above a substrate plane. The MEMS includes a movable structural element, a first spring element that mechanically connects the movable structural element to the substrate extension, and a second spring element that mechanically connects the movable structural element to the substrate extension. The first spring element and the second spring element form a parallelogram guide of the movable structural element in relation to the substrate extension.
Public/Granted literature
- US20210061642A1 MEMS COMPRISING A MOVABLE STRUCTURAL ELEMENT, AND MEMS ARRAY Public/Granted day:2021-03-04
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