Invention Grant
- Patent Title: Plating apparatus, pre-wet process method, and cleaning process method
-
Application No.: US17612024Application Date: 2020-12-22
-
Publication No.: US12054840B2Publication Date: 2024-08-06
- Inventor: Shao Hua Chang , Masaya Seki
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: BakerHostetler
- International Application: PCT/JP2020/047931 2020.12.22
- International Announcement: WO2022/137339A 2022.06.30
- Date entered country: 2021-11-17
- Main IPC: C25D21/08
- IPC: C25D21/08 ; C25D5/08 ; C25D5/48 ; C25D17/06

Abstract:
Provided is a technique that allows ensuring a downsized plating apparatus.
A plating apparatus includes a discharge module 50. The discharge module includes a module main body 51 including a plurality of nozzles 52 configured to discharge a process liquid upward, and a moving mechanism 60 including a rotation shaft 61 disposed at a side of a plating tank and connected to the module main body. The moving mechanism 60 moves the module main body by rotation of the rotation shaft. The moving mechanism moves the module main body between the first position and the second position. The plurality of nozzles are arranged such that the process liquid discharged from the plurality of nozzles is brought in contact with a lower surface of a substrate from a center portion to an outer peripheral edge portion when the module main body moves to the second position. The module main body further includes a recovery member configured to recover the process liquid dropped after being discharged from the plurality of nozzles and brought in contact with the lower surface of the substrate.
A plating apparatus includes a discharge module 50. The discharge module includes a module main body 51 including a plurality of nozzles 52 configured to discharge a process liquid upward, and a moving mechanism 60 including a rotation shaft 61 disposed at a side of a plating tank and connected to the module main body. The moving mechanism 60 moves the module main body by rotation of the rotation shaft. The moving mechanism moves the module main body between the first position and the second position. The plurality of nozzles are arranged such that the process liquid discharged from the plurality of nozzles is brought in contact with a lower surface of a substrate from a center portion to an outer peripheral edge portion when the module main body moves to the second position. The module main body further includes a recovery member configured to recover the process liquid dropped after being discharged from the plurality of nozzles and brought in contact with the lower surface of the substrate.
Public/Granted literature
- US20220396897A1 PLATING APPARATUS, PRE-WET PROCESS METHOD, AND CLEANING PROCESS METHOD Public/Granted day:2022-12-15
Information query