Integrated sensor modules for detection of chemical substances
Abstract:
An integrated sensor module includes a UV radiation source operable to emit UV radiation onto a sample, and a sensor including spectrally sensitive UV channels disposed so as receive UV radiation from the sample. Each of the UV channels includes a respective sensing device and a respective UV interference filter disposed over a UV radiation sensitive portion of the respective sensing device. The respective UV interference filter for each particular one of the channels has transmission characteristics that are spectrally responsive to a spectral signature of a respective chemical substance.
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