Pressure sensor, pressure sensor pixel array including pressure sensor, and electronic system including pressure sensor
Abstract:
A pressure sensor includes: a first substrate; a second substrate having an inner surface and a touch surface that is opposite to the inner surface, wherein the inner surface faces the first substrate with a resistance sensing space therebetween; a first electrode and a second electrode, which are arranged spaced apart from each other in the resistance sensing space; and a piezoresistive pattern arranged between the first electrode and the second electrode and disposed in the resistance sensing space, wherein the piezoresistive pattern includes a porous elastic support and a plurality of conductive carbon structures dispersed in the porous elastic support.
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