Invention Grant
- Patent Title: Thin-film crystalline structure with surfaces having selected plane orientations
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Application No.: US17511741Application Date: 2021-10-27
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Publication No.: US12057147B2Publication Date: 2024-08-06
- Inventor: Tong Zhao , Li Wan , Michael Christopher Kautzky
- Applicant: Seagate Technology LLC
- Applicant Address: US CA Fremont
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Fremont
- Agency: Mueting Raasch Group
- Main IPC: G11B5/31
- IPC: G11B5/31 ; B81C1/00 ; B82B1/00 ; H01F10/30 ; H01L21/3065 ; H01L21/67 ; B82Y10/00 ; G11B5/00 ; G11B11/24 ; H01L21/3213
Abstract:
A method of forming a thin film structure involves performing one or more repetitions to form a template on a wafer. The repetitions include: depositing a layer of a template material to a first thickness T1; and ion beam milling the layer of the template material to remove thickness T2, where T2
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