Invention Grant
- Patent Title: Metal gate cap
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Application No.: US18182665Application Date: 2023-03-13
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Publication No.: US12057486B2Publication Date: 2024-08-06
- Inventor: Chia-Wei Chen , Wei Cheng Hsu , Hui-Chi Chen , Jian-Hao Chen , Kuo-Feng Yu , Shih-Hang Chiu , Wei-Cheng Wang , Yen-Ju Chen
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: HAYNES AND BOONE, LLP
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/8238 ; H01L27/092 ; H01L29/49 ; H01L29/786

Abstract:
The present disclosure provides a semiconductor device and a method of forming the same. The semiconductor device includes a first channel members being vertically stacked, a second channel members being vertically stacked, an n-type work function layer wrapping around each of the first channel members, a first p-type work function layer over the n-type work function layer and wrapping around each of the first channel members, a second p-type work function layer wrapping around each of the second channel members, a third p-type work function layer over the second p-type work function layer and wrapping around each of the second channel members, and a gate cap layer over a top surface of the first p-type work function layer and a top surface of the third p-type work function layer such that the gate cap layer electrically couples the first p-type work function layer and the third p-type work function layer.
Public/Granted literature
- US20230215929A1 METAL GATE CAP Public/Granted day:2023-07-06
Information query
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