Invention Grant
- Patent Title: Electronic imaging detector with thermal conduction layer
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Application No.: US17130666Application Date: 2020-12-22
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Publication No.: US12057515B2Publication Date: 2024-08-06
- Inventor: Paul Mooney , Matthew Lent , Julio Kovacs , David Joyce
- Applicant: Gatan, Inc.
- Applicant Address: US CA Pleasanton
- Assignee: GATAN, INC.
- Current Assignee: GATAN, INC.
- Current Assignee Address: US CA Pleasanton
- Agency: Volpe Koenig
- Main IPC: H01L31/024
- IPC: H01L31/024 ; H01L27/146
Abstract:
A solid state active pixel image sensor for back illumination by an electron beam is described. The image sensor comprises a thermal conduction layer for heat removal. The image sensor may also comprise a thinned silicon substrate on which an epitaxial layer is formed. The substrate may also be completely removed before or after application of the thermal conduction layer. The thermal conduction layer may comprise a metal, a metal compound, silicon, diamond or graphite.
Public/Granted literature
- US20210193848A1 ELECTRONIC IMAGING DETECTOR WITH THERMAL CONDUCTION LAYER Public/Granted day:2021-06-24
Information query
IPC分类:
