- Patent Title: Three-dimensional memory devices and methods for forming the same
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Application No.: US17117690Application Date: 2020-12-10
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Publication No.: US12058858B2Publication Date: 2024-08-06
- Inventor: Kun Zhang , Linchun Wu , Wenxi Zhou , Zhiliang Xia , Zongliang Huo
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H01L21/02 ; H01L21/225 ; H01L21/311 ; H01L21/3115 ; H01L21/3205 ; H01L21/3213 ; H01L21/3215 ; H01L23/00 ; H01L25/065 ; H01L25/18 ; H01L29/04 ; H01L29/10 ; H01L29/16 ; H10B41/27

Abstract:
A 3D memory device includes a memory stack including interleaved stack conductive layers and stack dielectric layers, a semiconductor layer, and a channel structure extending vertically through the memory stack into the semiconductor layer. A first lateral dimension of a first portion of the channel structure facing the semiconductor layer is greater than a second lateral dimension of a second portion of the channel structure facing the memory stack. The channel structure includes a memory film and a semiconductor channel A first doping concentration of part of the semiconductor channel in the first portion of the channel structure is greater than a second doping concentration of part of the semiconductor channel in the second portion of the channel structure.
Public/Granted literature
- US20220157847A1 THREE-DIMENSIONAL MEMORY DEVICES AND METHODS FOR FORMING THE SAME Public/Granted day:2022-05-19
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