Invention Grant
- Patent Title: Transistor production method
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Application No.: US17182948Application Date: 2021-02-23
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Publication No.: US12058875B2Publication Date: 2024-08-06
- Inventor: Yusuke Kawakami
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP 18161269 2018.08.30
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H10K10/46 ; H10K71/12

Abstract:
Provided is a transistor production method including: forming a gate electrode on an object by using a conductive material; forming an insulating film on the gate electrode; forming a photoresponsive film on the insulating film by using a material containing a compound having a photoresponsive nitrobenzyl group; selectively exposing the photoresponsive film to dissociate the photoresponsive group in an exposed area, forming a pattern including a hydrophilic exposed area and a water-repellent unexposed area, disposing a conductive material in the exposed area to form a source electrode and a drain electrode, and forming a modified layer by subjecting the unexposed area to a plasma irradiation to remove a water-repellent film and further subjecting to a surface treatment; and forming a semiconductor layer on the modified layer.
Public/Granted literature
- US20210184143A1 TRANSISTOR PRODUCTION METHOD Public/Granted day:2021-06-17
Information query
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