Invention Grant
- Patent Title: Display device having polycrystalline silicon layer
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Application No.: US17503358Application Date: 2021-10-18
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Publication No.: US12058888B2Publication Date: 2024-08-06
- Inventor: Dong-Sung Lee , Seo Jong Oh , Byung Soo So , Dong-min Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: KILE PARK REED & HOUTTEMAN PLLC
- Priority: KR 20180142225 2018.11.19
- The original application number of the division: US16679656 2019.11.11
- Main IPC: H10K59/12
- IPC: H10K59/12 ; H01L21/02 ; H01L29/66 ; H01L29/786

Abstract:
A method of manufacturing a polycrystalline silicon layer for a display device includes the steps of forming an amorphous silicon layer on a substrate, cleaning the amorphous silicon layer with hydrofluoric acid, rinsing the amorphous silicon layer with hydrogenated deionized water, and irradiating the amorphous silicon layer with a laser beam to form a polycrystalline silicon layer.
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