Invention Grant
- Patent Title: Apparatus for laser machining and a method for compensating for errors of the same
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Application No.: US16746563Application Date: 2020-01-17
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Publication No.: US12059743B2Publication Date: 2024-08-13
- Inventor: Seunghwan Jung , Seokhwan Kim , Sanghyun Jung , Woodong Kim , Jaeil Kim , Ilyoung Jeong , Jongkil Han
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: F. Chau & Associates, LLC
- Priority: KR 20190008836 2019.01.23
- Main IPC: B23K26/03
- IPC: B23K26/03 ; B23K26/04 ; B23K26/08 ; B23K37/04 ; G05B19/402

Abstract:
An apparatus for laser machining is provided including a stage for supporting a substrate and a controller for generating an error compensation table, a motor driver for moving the stage, and an error compensation unit for generating a table to compensate for an error. The error compensation unit includes a grid plate disposed on the stage and an imaging unit for imaging the grid plate. The motor driver outputs a position synchronization signal to the imaging unit according to a position of the stage. The imaging unit receives the position synchronization signal from the motor driver and images the grid plate while moving the stage.
Public/Granted literature
- US20200230738A1 APPARATUS FOR LASER MACHINING AND A METHOD FOR COMPENSATING FOR ERRORS OF THE SAME Public/Granted day:2020-07-23
Information query
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