A micro-electromechanical system (MEMS) micro-mirror arrays with an aperiodic structure is described. This avoids the undesired noise of sidelobes generated by the gaps between rows of mirrors, where a periodic structure forms a diffraction pattern. A MEMS apparatus has a MEMS mirror array structure with a plurality of rows. The widths of the rows are sized to be different, so that the pattern of gaps between rows is aperiodic. This has the effect of spreading diffraction nodes beyond the 0 order, thus limiting the interference of diffracted nodes and improving the signal to noise ratio. In particular, the width of a mirror will vary in different rows, while all of the mirrors in a particular row will have the same width and same size.