Invention Grant
- Patent Title: Systems and methods for adaptive troubleshooting of semiconductor manufacturing equipment
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Application No.: US17459433Application Date: 2021-08-27
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Publication No.: US12061458B2Publication Date: 2024-08-13
- Inventor: Milind Jayram Gadre , Prashanth Kumar
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: G05B19/406
- IPC: G05B19/406 ; G06F16/901 ; G06N20/00

Abstract:
A system includes a processing device, operatively coupled to the memory device, to perform operations comprising obtaining a plurality of sensor values associated with a deposition process performed, according to a recipe, in a process chamber to deposit film on a surface of a substrate; generating a manufacturing data graph based on the plurality of sensor values; receiving, via a user interface, a selection of a data point on the manufacturing graph; receiving failure data associated with the data point; and storing, in a data structure, the failure data to be accessible via the user interface presenting the manufacturing data graph.
Public/Granted literature
- US20230061513A1 SYSTEMS AND METHODS FOR ADAPTIVE TROUBLESHOOTING OF SEMICONDUCTOR MANUFACTURING EQUIPMENT Public/Granted day:2023-03-02
Information query
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