Invention Grant
- Patent Title: Method and system for adjustable coating using magnetron sputtering systems
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Application No.: US17311963Application Date: 2020-04-07
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Publication No.: US12062531B2Publication Date: 2024-08-13
- Inventor: Dominik Wagner
- Applicant: INTERPANE ENTWICKLUNGS—UND BERATUNGSGESELLSCHAFT MBH
- Applicant Address: DE Lauenfoerde
- Assignee: INTERPANE ENTWICKLUNGS—UND BERATUNGSGESELLSCHAFT MBH
- Current Assignee: INTERPANE ENTWICKLUNGS—UND BERATUNGSGESELLSCHAFT MBH
- Current Assignee Address: DE Lauenfoerde
- Agency: Potomac Technology Law, LLC
- Priority: EP 171489 2019.04.29
- International Application: PCT/EP2020/059868 2020.04.07
- International Announcement: WO2020/221563A 2020.11.05
- Date entered country: 2021-06-08
- Main IPC: C23C14/35
- IPC: C23C14/35 ; H01J37/34

Abstract:
A method and a system for adjustable coating on a substrate using a magnetron sputtering apparatus are provided. The method comprises the steps of providing a magnetron assembly which comprises a plurality of magnets attached to a plurality of yokes and a plurality of actuating mechanisms (208), each operatively coupled to at least one of the plurality of yokes. The method further comprises automatically determining individual positions of each of the plurality of yokes of the magnetron assembly on the basis of at least one parameter, and adjusting individually positions of each of the plurality of yokes of the magnetron assembly in accordance with the automatically determined individual positions.
Public/Granted literature
- US20220028673A1 METHOD AND SYSTEM FOR ADJUSTABLE COATING USING MAGNETRON SPUTTERING SYSTEMS Public/Granted day:2022-01-27
Information query
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