Invention Grant
- Patent Title: Zero mask high density capacitor
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Application No.: US18153380Application Date: 2023-01-12
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Publication No.: US12062652B2Publication Date: 2024-08-13
- Inventor: Chung-Hui Chen , Wan-Te Chen , Cheng-Hsiang Hsieh , Chia-Tien Wu
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: Jones Day
- Main IPC: H01L27/01
- IPC: H01L27/01 ; H01L23/522 ; H01L23/528 ; H01L49/02

Abstract:
Methods and semiconductor devices are described herein which eliminate the use of additional masks. A first interconnect layer is formed. A first resistive layer is formed on top of the first interconnect layer. A dielectric layer is formed on top of the first resistive layer. A second resistive layer is formed on top of the dielectric layer.
Public/Granted literature
- US20230170343A1 Zero Mask High Density Capacitor Public/Granted day:2023-06-01
Information query
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