Invention Grant
- Patent Title: Trench isolation structure for scaled pixel region
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Application No.: US17372866Application Date: 2021-07-12
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Publication No.: US12062678B2Publication Date: 2024-08-13
- Inventor: Cheng Yu Huang , Wei-Chieh Chiang , Keng-Yu Chou , Tzu-Hsuan Hsu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
The present disclosure, in some embodiments, relates to an image sensor integrated chip. The image sensor integrated chip includes a substrate having a first side and a second side opposing the first side. The substrate has one or more sidewalls defining a trench extending along opposing sides of a pixel region having a first width. An isolation structure including one or more dielectric materials is disposed within the trench. The isolation structure has a second width. An image sensing element and a focal region are disposed within the pixel region. The focal region is configured to receive incident radiation along the second side of the substrate. A ratio of the second width to the first width is in a range of between approximately 0.1 and approximately 0.2, so that the focal region is completely confined between interior sidewall of the isolation structure facing the image sensing element.
Public/Granted literature
- US20220328535A1 TRENCH ISOLATION STRUCTURE FOR SCALED PIXEL REGION Public/Granted day:2022-10-13
Information query
IPC分类: