Invention Grant
- Patent Title: Silicon carbide transistor device
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Application No.: US17631730Application Date: 2020-07-31
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Publication No.: US12062698B2Publication Date: 2024-08-13
- Inventor: Marco Bellini , Lars Knoll , Stephan Wirths
- Applicant: Hitachi Energy Ltd
- Applicant Address: CH Zürich
- Assignee: Hitachi Energy Ltd
- Current Assignee: Hitachi Energy Ltd
- Current Assignee Address: CH Zürich
- Agency: Slater Matsil, LLP
- Priority: EP 189583 2019.08.01
- International Application: PCT/EP2020/071689 2020.07.31
- International Announcement: WO2021/019082A 2021.02.04
- Date entered country: 2022-01-31
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/04 ; H01L29/16 ; H01L29/417 ; H01L29/423 ; H01L29/66 ; H01L29/739 ; H01L29/78

Abstract:
A silicon carbide transistor device includes a silicon carbide semiconductor and a silicon carbide epitaxial layer formed at a top surface of the substrate. A source structure is formed in a top surface of the silicon carbide epitaxial layer and includes a p-well region, a n-type source region and a p-type contact region. A source contact structure is formed over and electrically connected to a top surface of the source structure. A planar gate structure includes a gate dielectric and a gate runner adjacent a p-type channel region. The gate dielectric covers the channel region, at least part of the source structure and at least part of the source contact structure. The gate runner is electrically insulated from the channel region and the source structure and the source contact structure by the gate dielectric and overlaps the channel region.
Public/Granted literature
- US20220278205A1 Silicon Carbide Transistor Device Public/Granted day:2022-09-01
Information query
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