Invention Grant
- Patent Title: Memory device and forming method thereof
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Application No.: US17715886Application Date: 2022-04-07
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Publication No.: US12062713B2Publication Date: 2024-08-13
- Inventor: Ya-Jui Tsou , Wei-Jen Chen , Pang-Chun Liu , Chee-Wee Liu , Shao-Yu Lin , Chih-Lin Wang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. , NATIONAL TAIWAN UNIVERSITY
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.,NATIONAL TAIWAN UNIVERSITY
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.,NATIONAL TAIWAN UNIVERSITY
- Current Assignee Address: TW Hsinchu; TW Taipei
- Agency: Maschoff Brennan
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A memory device comprises a source region, a drain region, a channel region, a gate dielectric layer, an MTJ stack, and a metal gate. The source region and the drain region are over a substrate. The channel region is between the source region and the drain region. The gate dielectric layer is over the channel region. The MTJ stack is over the gate dielectric layer. The MTJ stack comprises a first ferromagnetic layer, a second ferromagnetic layer with a switchable magnetization, and a tunnel barrier layer between the first and second ferromagnetic layers. The metal gate is over the MTJ stack.
Public/Granted literature
- US20230170403A1 MEMORY DEVICE AND FORMING METHOD THEREOF Public/Granted day:2023-06-01
Information query
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