A method for manufacturing an energy storage device. A stack is provided on a substrate. The stack comprises a first electrode layer, a second electrode layer, and an electrolyte layer between the first electrode layer and the second electrode layer. The method includes forming a first groove, a second groove, and a third groove in a first side of the stack opposite to a second side of the stack on the substrate. The first groove has a first depth and a first surface comprising a first exposed surface of the second electrode layer. The second groove has a second depth different from the first depth and a second surface comprising an exposed surface of the first electrode layer. The third groove has a third depth substantially the same as the first depth and a third surface comprising a second exposed surface of the second electrode layer.