Invention Grant
- Patent Title: Acoustic wave device with ceramic substrate
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Application No.: US16680136Application Date: 2019-11-11
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Publication No.: US12063027B2Publication Date: 2024-08-13
- Inventor: Rei Goto , Hironori Fukuhara , Hiroyuki Nakamura , Keiichi Maki
- Applicant: Skyworks Solutions, Inc.
- Applicant Address: US CA Irvine
- Assignee: Skyworks Solutions, Inc.
- Current Assignee: Skyworks Solutions, Inc.
- Current Assignee Address: US CA Irvine
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/58 ; H03H9/05

Abstract:
A surface acoustic wave device is disclosed. The surface acoustic wave device can include a ceramic substrate, a piezoelectric layer over the ceramic substrate, and an interdigital transducer electrode over the piezoelectric layer. The ceramic substrate can be a polycrystalline spinel substrate. The surface acoustic wave device can also include a temperature compensating layer over the interdigital transducer electrode.
Public/Granted literature
- US20200162053A1 ACOUSTIC WAVE DEVICE WITH CERAMIC SUBSTRATE Public/Granted day:2020-05-21
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