Invention Grant
- Patent Title: Integrated assemblies having metal-containing liners along bottoms of trenches, and methods of forming integrated assemblies
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Application No.: US17941900Application Date: 2022-09-09
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Publication No.: US12063782B2Publication Date: 2024-08-13
- Inventor: John D. Hopkins , Justin D. Shepherdson , Collin Howder , Jordan D. Greenlee
- Applicant: Lodestar Licensing Group LLC
- Applicant Address: US IL Evanston
- Assignee: Lodestar Licensing Group LLC
- Current Assignee: Lodestar Licensing Group LLC
- Current Assignee Address: US IL Evanston
- Agency: Brooks, Cameron & Huebsch, PLLC
- The original application number of the division: US16445065 2019.06.18
- Main IPC: H10B43/27
- IPC: H10B43/27 ; H01L21/02 ; H01L21/28 ; H01L21/285 ; H01L21/311 ; H01L29/66 ; H10B41/10 ; H10B41/27 ; H10B43/10

Abstract:
Some embodiments include methods of forming integrated assemblies. A conductive structure is formed to include a semiconductor-containing material over a metal-containing material. An opening is formed to extend into the conductive structure. A conductive material is formed along a bottom of the opening. A stack of alternating first and second materials is formed over the conductive structure either before or after forming the conductive material. Insulative material and/or channel material is formed to extend through the stack to contact the conductive material. Some embodiments include integrated assemblies.
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