Invention Grant
- Patent Title: Micromechanical structure and method of providing the same
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Application No.: US17459073Application Date: 2021-08-27
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Publication No.: US12071338B2Publication Date: 2024-08-27
- Inventor: Christian Drabe , Bert Kaiser
- Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Perkins Coie LLP
- Agent Michael A. Glenn
- Priority: DE 2019202656.7 2019.02.27 DE 2019202658.3 2019.02.27
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00

Abstract:
A micromechanical structure has a first micromechanical element, a second micromechanical element and a torsion spring arrangement having a first torsion spring element, having a first center line, mechanically connected to the first micromechanical element at a first contact region and to the second micromechanical element at a second contact region, and having a second torsion spring element, having a second center line, mechanically connected to the first micromechanical member at a third contact region and to the second micromechanical member at a fourth contact region in order to connect the first micromechanical member and the second micromechanical member to be movable relative to each other. A distance between the first and second center lines, starting from the first and third contact regions toward the second and fourth contact regions, decreases in a first portion and increases in a second portion. In a rest position of the micromechanical structure, the first and second torsion spring elements are arranged without contact to each other.
Public/Granted literature
- US20210387851A1 MICROMECHANICAL STRUCTURE AND METHOD OF PROVIDING THE SAME Public/Granted day:2021-12-16
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