Invention Grant
- Patent Title: Monolithic conductive column in a semiconductor device and associated methods
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Application No.: US17670378Application Date: 2022-02-11
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Publication No.: US12074094B2Publication Date: 2024-08-27
- Inventor: Wei Zhou , Kyle K. Kirby , Bret K. Street , Kunal R. Parekh
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/768 ; H01L23/00 ; H01L23/48 ; H01L25/065

Abstract:
A semiconductor device having monolithic conductive columns, and associated systems and methods, are disclosed herein. The semiconductor device can include a semiconductor substrate, a conductive pad, an opening, a non-conductive liner, and a plug of non-conductive material. The conductive pad may be at a surface of the semiconductor substrate. The opening may extend through the semiconductor substrate from the conductive pad to a second surface and define a side wall. The liner may coat the side wall and the plug may fill the opening. A second opening may be formed through the semiconductor device and the opening and a conductive material plated therein.
Public/Granted literature
- US20230260875A1 MONOLITHIC CONDUCTIVE COLUMN IN A SEMICONDUCTOR DEVICE AND ASSOCIATED METHODS Public/Granted day:2023-08-17
Information query
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