Invention Grant
- Patent Title: Selective transfer of micro devices
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Application No.: US17222506Application Date: 2021-04-05
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Publication No.: US12075565B2Publication Date: 2024-08-27
- Inventor: Gholamreza Chaji
- Applicant: VueReal Inc.
- Applicant Address: CA Waterloo
- Assignee: VueReal Inc.
- Current Assignee: VueReal Inc.
- Current Assignee Address: CA Waterloo
- Agency: NIXON PEABODY LLP
- The original application number of the division: US15442293 2017.02.24
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L23/00 ; H05K1/11 ; H05K13/00 ; H05K13/04 ; G01R31/26 ; H01L21/66 ; H01L25/00

Abstract:
What is disclosed is a method of selectively transferring micro devices from a donor substrate to contact pads on a receiver substrate. Micro devices being attached to a donor substrate with a donor force. The donor substrate and receiver substrate are aligned and brought together so that selected micro devices meet corresponding contact pads. A receiver force is generated to hold selected micro devices to the contact pads on the receiver substrate. The donor force is weakened and the substrates are moved apart leaving selected micro devices on the receiver substrate. Several methods of generating the receiver force are disclosed, including adhesive, mechanical and electrostatic techniques.
Public/Granted literature
- US20210243894A1 SELECTIVE TRANSFER OF MICRO DEVICES Public/Granted day:2021-08-05
Information query
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