Invention Grant
- Patent Title: Vertical metal oxide semiconductor channel selector transistor and methods of forming the same
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Application No.: US18317958Application Date: 2023-05-16
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Publication No.: US12075633B2Publication Date: 2024-08-27
- Inventor: Yong-Jie Wu , Yen-Chung Ho , Mauricio Manfrini , Chung-Te Lin , Pin-Cheng Hsu
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Agency: The Marbury Law Group, PLLC
- The original application number of the division: US16909109 2020.06.23
- Main IPC: H10B63/00
- IPC: H10B63/00 ; H01L29/66 ; H01L29/786 ; H10B53/30 ; H10B53/40 ; H10N70/00 ; H10N70/20

Abstract:
A device structure includes at least one selector device. Each selector device includes a vertical stack including, from bottom to top, a bottom electrode, a metal oxide semiconductor channel layer, and a top electrode and located over a substrate, a gate dielectric layer contacting sidewalls of the bottom electrode, the metal oxide semiconductor channel layer, and the top electrode, and a gate electrode formed within the gate dielectric layer and having a top surface that is coplanar with a top surface of the top electrode. Each top electrode or each bottom electrode of the at least one selector device may be contacted by a respective nonvolatile memory element to provide a one-selector one-resistor memory cell.
Public/Granted literature
- US20230284461A1 VERTICAL METAL OXIDE SEMICONDUCTOR CHANNEL SELECTOR TRANSISTOR AND METHODS OF FORMING THE SAME Public/Granted day:2023-09-07
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