Invention Grant
- Patent Title: Mask assembly and method of manufacturing the same
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Application No.: US17516030Application Date: 2021-11-01
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Publication No.: US12077841B2Publication Date: 2024-09-03
- Inventor: Kwanghyun Kim , Heonsik Ha , Woo-Seok Jeon
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-Si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: CANTOR COLBURN LLP
- Priority: KR 20200181956 2020.12.23
- Main IPC: C23C14/04
- IPC: C23C14/04 ; B05D1/32 ; B05D5/06 ; C23C14/08

Abstract:
A manufacturing method of a mask assembly includes forming a cell mask including masking patterns and a mesh frame including conductive patterns disposed to correspond to the masking patters and disposing the cell mask and the mesh frame on a mask frame. The forming the cell mask and the mesh frame includes forming a polymer layer, a conductive layer, and a hard masking layer, forming a mask pattern layer including etch patterns, and forming the cell mask and the mesh frame using the mask pattern layer.
Public/Granted literature
- US20220195578A1 MASK ASSEMBLY AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2022-06-23
Information query
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