Invention Grant
- Patent Title: Mo doped AlCrSiN/Mo self-lubricating films and preparation method thereof
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Application No.: US17655907Application Date: 2022-03-22
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Publication No.: US12077842B2Publication Date: 2024-09-03
- Inventor: Tiegang Wang , Deqiang Meng , Yanmei Liu , Bing Yan , Renren Xu , Zhaoxing Yin
- Applicant: TIANJIN UNIV. OF TECHNOLOGY AND EDUCATION (TEACHER DEVT. CENTER OF CHINA VOC. TRAINING AND GUIDANCE)
- Applicant Address: CN Tianjin
- Assignee: TIANJIN UNIVERSITY OF TECHNOLOGY AND EDUCATION (TEACHER DEVELOPMENT CENTER OF CHINA VOCATIONAL TRAINING AND GUIDANCE)
- Current Assignee: TIANJIN UNIVERSITY OF TECHNOLOGY AND EDUCATION (TEACHER DEVELOPMENT CENTER OF CHINA VOCATIONAL TRAINING AND GUIDANCE)
- Current Assignee Address: CN Tianjin
- Agency: NKL Law
- Agent Allen Xue
- Priority: CN 1910897038.6 2019.09.23
- Main IPC: C23C14/06
- IPC: C23C14/06 ; C23C14/02 ; C23C14/35
Abstract:
Mo doped AlCrSiN/Mo self-lubricating films and a preparation method thereof are provided. The AlCrSiN/Mo self-lubricating films are prepared by doping Mo element into the AlCrSiN films, and the Mo content in the resulted films is in the range of 0.3-6.3 at. %. The films are prepared on the substrates by high power impulse magnetron sputtering (HiPIMS) and pulsed DC magnetron sputtering hybrid coating technology. The prepared AlCrSiN/Mo self-lubricating films possess high hardness, good toughness, excellent antifriction characteristics and good chemical stability.
Public/Granted literature
- US20220213588A1 Mo Doped AlCrSiN/Mo Self-lubricating Films and Preparation Method Thereof Public/Granted day:2022-07-07
Information query
IPC分类:
