• Patent Title: Microbolometer with filtering function
  • Application No.: US17615361
    Application Date: 2020-06-05
  • Publication No.: US12078545B2
    Publication Date: 2024-09-03
  • Inventor: Nicolas Boudou
  • Applicant: LYNRED
  • Applicant Address: FR Palaiseau
  • Assignee: LYNRED
  • Current Assignee: LYNRED
  • Current Assignee Address: FR Palaiseau
  • Agency: Perilla Knox & Hildebrandt LLP
  • Agent Jason M. Perilla
  • Priority: FR 05965 2019.06.05
  • International Application: PCT/EP2020/065680 2020.06.05
  • International Announcement: WO2020/245395A 2020.12.10
  • Date entered country: 2021-11-30
  • Main IPC: G01J5/20
  • IPC: G01J5/20 G01J5/00
Microbolometer with filtering function
Abstract:
The present disclosure relates to a microbolometer comprising an array of pixels, each pixel comprising one or more detection cells, each detection cell comprising an absorption layer (530) forming a quarter-wave cavity (533) having a height (h) of between 1.5 and 5 μm, wherein the pitch of the detection cells in at least one axis in a plane of the pixel array is in the range 2.4 h to 3.6 h.
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