Invention Grant
- Patent Title: Impedance match with an elongated RF strap
-
Application No.: US17795225Application Date: 2021-01-12
-
Publication No.: US12080518B2Publication Date: 2024-09-03
- Inventor: Felix Leib Kozakevich , Alexei Marakhtanov , Bing Ji , Ranadeep Bhowmick , John Holland
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: PENILLA IP, APC
- International Application: PCT/US2021/013111 2021.01.12
- International Announcement: WO2021/154492A 2021.08.05
- Date entered country: 2022-07-25
- Main IPC: H03H7/38
- IPC: H03H7/38 ; H01J37/32

Abstract:
An impedance match is described. The impedance match includes a housing having a bottom portion and a top portion. The bottom portion has match components and the top portion has an elongated body. A low frequency input is connected through the bottom portion of the housing, and the low frequency input is interconnected to a first set of capacitors and inductors. A high frequency input is connected through the bottom portion of the housing, and the high frequency input is interconnected to a second set of capacitors and inductors. An elongated strap extends between the bottom portion and the top portion of the housing. A lower portion of the elongated strap is coupled to the second set of capacitors and inductors and an upper portion of the elongated strap is connected to an RF rod at an end of the elongated body.
Public/Granted literature
- US20230081542A1 IMPEDANCE MATCH WITH AN ELONGATED RF STRAP Public/Granted day:2023-03-16
Information query