Invention Grant
- Patent Title: Movement systems for sputter coating of non-flat substrates
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Application No.: US17626244Application Date: 2020-07-14
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Publication No.: US12080527B2Publication Date: 2024-09-03
- Inventor: Wilmert De Bosscher , Ivan Van De Putte , Niek Dewilde
- Applicant: SOLERAS ADVANCED COATINGS BV
- Applicant Address: BE Deinze
- Assignee: SOLERAS ADVANCED COATINGS BV
- Current Assignee: SOLERAS ADVANCED COATINGS BV
- Current Assignee Address: BE Deinze
- Agency: Workman Nydegger
- Priority: BE 195454 2019.07.14
- International Application: PCT/EP2020/069854 2020.07.14
- International Announcement: WO2021/009158A 2021.01.21
- Date entered country: 2022-01-11
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C14/34 ; C23C14/35 ; C23C14/50 ; H01J37/34

Abstract:
A movement system is provided for moving a non-flat substrate across a sputter flux distribution without circumferentially exposing the non-flat substrate to the sputter flux distribution. The movement system is arranged for a first movement of translationally transporting the non-flat substrate along the sputter flux distribution, and a second movement of translating and/or rotating the non-flat substrate with respect to the sputter flux distribution.
Public/Granted literature
- US20220254613A1 MOVEMENT SYSTEMS FOR SPUTTER COATING OF NON-FLAT SUBSTRATES Public/Granted day:2022-08-11
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