Invention Grant
- Patent Title: Substrate processing module and method of moving a workpiece
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Application No.: US16923792Application Date: 2020-07-08
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Publication No.: US12080571B2Publication Date: 2024-09-03
- Inventor: Kirankumar Neelasandra Savandaiah , Srinivasa Rao Yedla , Thomas Brezoczky
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C14/35 ; H01L21/677 ; H01L21/687

Abstract:
Embodiments disclosed herein include a substrate processing module and a method of moving a workpiece. The substrate processing module includes a shutter stack and two process stations. The shutter stack is disposed between the process stations. The method of moving a workpiece includes moving a supporting portion from a first location to a shutter stack in a first direction, retrieving the workpiece from the shutter stack, and moving the supporting portion to a second location. The transfer chamber assembly and method allows for moving workpieces to and from the shutter stack to the two process stations. A central transfer robot of the substrate processing module is configured to grip both substrates and shutter discs, allowing for one robot when typically two robots would be required.
Public/Granted literature
- US20220013383A1 SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE Public/Granted day:2022-01-13
Information query
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