Invention Grant
- Patent Title: Temperature offset and zone control tuning
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Application No.: US16780460Application Date: 2020-02-03
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Publication No.: US12080573B2Publication Date: 2024-09-03
- Inventor: Ole Luckner , Shankar Muthukrishnan , Wolfgang R. Aderhold
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G05B15/02 ; H01L21/324 ; H01L21/66
Abstract:
A method for controlling temperature in a thermal processing chamber includes determining temperature sensitivity profiles of one or more heating elements or zones for a substrate based on measurements of the substrate. The method also includes selecting a temperature offset value for each of the one or more heating elements or zones. The method also includes simulating the adjustment of each of the one or more zone offset values to a respective final adjusting value that achieves a predetermined goal. The method further includes adjusting the temperature offset values for each of the one or more heating elements to the respective final adjusted values.
Public/Granted literature
- US20200251362A1 TEMPERATURE OFFSET AND ZONE CONTROL TUNING Public/Granted day:2020-08-06
Information query
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