Invention Grant
- Patent Title: Multi-layer metal stack for active pixel region and black pixel region of image sensor and methods thereof
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Application No.: US17561351Application Date: 2021-12-23
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Publication No.: US12080740B2Publication Date: 2024-09-03
- Inventor: Kazufumi Watanabe , Chih-Wei Hsiung , Chao Niu
- Applicant: OMNIVISION TECHNOLOGIES, INC.
- Applicant Address: US CA Santa Clara
- Assignee: OMNIVISION TECHNOLOGIES, INC.
- Current Assignee: OMNIVISION TECHNOLOGIES, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L27/146

Abstract:
An image sensor includes an active pixel photodiode, a black pixel photodiode, a metal grid structure, and a light shield. Each of the active pixel photodiode and the black pixel photodiode are disposed in a semiconductor material having a first side and a second side opposite the first side. The first side of the semiconductor material is disposed between the light shield and the black pixel photodiode. The metal grid structure includes a first multi-layer metal stack including a first metal and a second metal different from the first metal. The light shield includes a second multi-layer stack including the first metal and the second metal. A first thickness of the first multi-layer metal stack is less than a second thickness of the second multi-layer metal stack.
Public/Granted literature
Information query
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