Invention Grant
- Patent Title: Solid-state imaging apparatus, method of manufacturing the same, and electronic device
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Application No.: US17289719Application Date: 2019-11-01
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Publication No.: US12080747B2Publication Date: 2024-09-03
- Inventor: Hirohisa Uchida , Shinichiro Noudo , Tooru Idekoba
- Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: CHIP LAW GROUP
- Priority: JP 18211638 2018.11.09
- International Application: PCT/JP2019/043110 2019.11.01
- International Announcement: WO2020/095850A 2020.05.14
- Date entered country: 2021-04-28
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
The solid-state imaging apparatus (1) according to the present disclosure includes a semiconductor layer (51), a light shield wall (60b), and an insulation layer. The semiconductor layer (51) is provided with a plurality of photoelectric conversion units and a plurality of charge retention units that retain charge generated by the photoelectric conversion units (26). The light shield wall (60b) is provided inside a trench (51a) formed in a depth direction from a light-incident side between the photoelectric conversion units and the charge retention units (26) adjacent to each other in the semiconductor layer (51). The insulation layer is provided on a side of the semiconductor layer (51) opposite from the light-incident side, and having an opening (53a) that surrounds the trench (51a).
Public/Granted literature
- US20220005851A1 SOLID-STATE IMAGING APPARATUS, METHOD OF MANUFACTURING THE SAME, AND ELECTRONIC DEVICE Public/Granted day:2022-01-06
Information query
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